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RT 🌿 lithos: Patterning tricks: Basic feedforward methods in the fab can deliver EUV-like geometries using immersion lithography. It isn’t obvious…
RT 🌿 lithosPatterning tricks: Basic feedforward methods in the fab can deliver EUV-like geometries using immersion lithography.It isn’t obvious, but immersion lithography combined with a sophisticated deposition-and-etch scheme such as self-aligned quadruple patterning (SAQP) can actually achieve better resolution than